Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment
🏛 National Institute of Standards and Technology
Can you apply?
This grant is for entities seeking substantial funding to develop or expand semiconductor manufacturing and materials research facilities within the United States. Eligible applicants include for-profit companies, nonprofit organizations, academic institutions, and consortia with expertise in semiconductor manufacturing. The program prioritizes domestic semiconductor production to support supply chain resilience and economic competitiveness. Applicants must demonstrate technical capability, financial commitment, and a credible project plan to establish or upgrade manufacturing infrastructure, materials processing capabilities, or research facilities for semiconductor production. Geographic scope is nationwide, and activities supported include facility construction, equipment acquisition, process development, and workforce training infrastructure aligned with semiconductor manufacturing objectives.
This grant is for entities seeking substantial funding to develop or expand semiconductor manufacturing and materials research facilities within the United States. Eligible applicants include for-profit companies, nonprofit organizations, academic institutions, and consortia with expertise in semiconductor manufacturing. The program prioritizes domestic semiconductor production to support supply chain resilience and economic competitiveness. Applicants must demonstrate technical capability, financial commitment, and a credible project plan to establish or upgrade manufacturing infrastructure, materials processing capabilities, or research facilities for semiconductor production. Geographic scope is nationwide, and activities supported include facility construction, equipment acquisition, process development, and workforce training infrastructure aligned with semiconductor manufacturing objectives.
Program description
The CHIPS Incentives Program aims to catalyze long-term economically sustainable growth in the domestic semiconductor industry in support of U.S. economic and national security. This is the second Notice of Funding Opportunity under this program and seeks applications for projects for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment.
For more information, additional resources, and instructions on how to apply, please visit chips.gov. Note that all applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov. If you have any questions on how to apply, please email apply@chips.gov.
Who can apply
Eligible applicants
Details
This grant is for entities seeking substantial funding to develop or expand semiconductor manufacturing and materials research facilities within the United States. Eligible applicants include for-profit companies, nonprofit organizations, academic institutions, and consortia with expertise in semiconductor manufacturing. The program prioritizes domestic semiconductor production to support supply chain resilience and economic competitiveness. Applicants must demonstrate technical capability, financial commitment, and a credible project plan to establish or upgrade manufacturing infrastructure, materials processing capabilities, or research facilities for semiconductor production. Geographic scope is nationwide, and activities supported include facility construction, equipment acquisition, process development, and workforce training infrastructure aligned with semiconductor manufacturing objectives.
How to apply
Application links
Required documents
- SF-424 (federal application form)
- SF-424 Supplement for NIST (if applicable)
- Detailed project narrative describing facility scope, technical approach, and semiconductor manufacturing objectives
- Comprehensive project budget with detailed cost breakdowns and matching fund documentation
- Facility plans, architectural renderings, or site descriptions
- Letters of commitment from equipment suppliers, partners, workforce training providers, and/or state/local economic development agencies
- Organizational capability statement and resumes of key personnel
- Workforce development and training plan
- Environmental assessment or preliminary environmental review
- Financial statements and evidence of organizational fiscal stability
- Timeline and milestone schedule for project completion
- Literature or data supporting technical feasibility and market demand
Program contact
- 👤 Misty L Roosa Management Analyst
- 📧 apply@chips.gov
- 📞 301-975-3007
Funding track record
No recent recipient data available for CFDA 11.037 in our database.
This can happen for newer programs, programs that use non-standard award types (loans, direct payments, fellowships), or those funded through sub-agencies under different codes.
FAQ
Who is eligible to apply for this CHIPS Incentives grant?
Eligible applicants include for-profit semiconductor manufacturers, consortia, nonprofit research institutions, universities, and other entities operating within the United States with demonstrated capability in semiconductor manufacturing or materials science. Domestic presence and commitment to U.S.-based manufacturing are required.
What is the typical deadline and application timeline?
The program has rolling or periodic deadlines. The most recent known deadline is November 1, 2026, with applications accepted from September 29, 2023 onward. Check NIST's official channels for confirmation of current and future deadlines.
What types of projects and activities does this grant support?
The program supports facility construction, equipment procurement, process development, materials research infrastructure, workforce training facilities, and other capital investments directly supporting semiconductor manufacturing and advanced materials production in the United States.
How competitive is this funding and what is the typical award range?
This is highly competitive federal funding tied to national strategic priorities. Award amounts typically range from millions to tens of millions of dollars depending on project scope. Strong technical merit, financial viability, and alignment with U.S. manufacturing policy are essential.
What documentation and planning is required?
Applicants must provide detailed project narratives, comprehensive budgets, facility plans, timelines, letters of commitment from project partners, evidence of technical expertise, environmental assessments, workforce development plans, and often require state or local government support letters demonstrating regional economic impact.
💡 Tips for applicants
- Ensure your organization has genuine semiconductor manufacturing or materials research expertise and a credible track record; federal reviewers scrutinize technical feasibility and organizational capacity intensely for infrastructure projects of this scale.
- Build strong partnerships early—include letters of commitment from equipment suppliers, workforce training providers, and state/local economic development agencies to demonstrate comprehensive project readiness and community support.
- Clearly articulate how your project strengthens U.S. semiconductor supply chain resilience, creates domestic jobs, and contributes to national competitiveness; alignment with CHIPS Act goals is critical for scoring favorability.
- Develop a detailed financial plan showing matching funds, private sector investment, or other cost-share commitments; federal reviewers want evidence your organization has genuine skin in the game and isn't relying entirely on government money.
- Work closely with NIST program officers early to understand their current priorities, funding thresholds, and evaluation criteria; attend any pre-application workshops and request feedback on concept summaries before investing months in a full proposal.
⚠️ Common mistakes
Applicants often underestimate the scope of required documentation for large infrastructure projects, submitting vague facility plans or unrealistic timelines. Another frequent error is failing to clearly demonstrate how the project advances domestic semiconductor manufacturing capacity or fills a specific supply chain gap—reviewers prioritize strategic national impact. Additionally, weak financial planning (inadequate cost-share, unclear funding sources, or unrealistic budgets) signals weak organizational commitment and frequently results in rejection or low scores.
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